Design and Simulation of a Piezoelectric Ultrasonic Micro Motor

Micro machined motors are a recent development in the domain of electrical machines. As compared to conventional electromagnetic motors, micro machined motors offer higher torque at lower speeds, and are they are compact in size. This paper focusses on the study of a piezoelectric ultrasonic micro motor that is based on inverse piezoelectric effect. Here, the stator with segmented piezoelectric ring is designed with ten wave number operation. This is achieved by a new polarization pattern of the segment, and a new electrode configuration of the ring. The design and analysis of the stator is the main step in designing these motors. Eigen frequency analysis resulted in different mode shapes and the corresponding natural frequencies. Frequency analysis gives the resonant frequency which was observed to be 52 kHz with tenth mode shapes. In the transient analysis the stator reaches a steady state after 1.8ms. This analysis is crucial in optimizing the motor design which will be considered in future. The analysis is carried out using COMSOL.